Piezoelectric Silicon Micropump for Drug Delivery Applications

Subcutaneous injection is crucial for the treatment of many diseases. Especially regular or continuous injections, automated dosing beneficial. However, existing devices are large, uncomfortable, visible under clothing, interfere with physical activity. Thus, development small, energy efficient and reliable patch pumps implantable systems necessary research on microelectromechanical system (MEMS) based drug delivery has gained increasing interest. requirements medical applications challenging especially precision reliability MEMS not yet sufficiently evaluated. To enable further miniaturization, we propose a precise 5 × mm2 silicon micropump. Detailed experimental evaluation ten proves backpressure capability air 12.5 ± 0.8 kPa, which indicates ability to transport bubbles. The maximal water flow rate 74 6 µL/min pumps’ average blocking pressure 51 kPa. bolus deliveries insulin shows high repeatability dosed package volumes. show mean standard deviation only 0.02 mg 0.5 packages, therefore, stay below generally accepted 5% deviation, even this extremely small amount. enables combination higher concentrated medication foundation an miniaturized pump.